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大位移多折叠梁静电驱动器的设计及力学性能分析
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大位移多折叠梁静电驱动器的设计及力学性能分析
DESIGN AND MECHANICAL CHARACTER ANALYSE OF A NOVEL TYPE OF MICRO ELECTROSTATIC ACTUATOR WITH MULTI-FOLDED SUSPENSIONS
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更新时间：2026/8/19 3:25:24